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ULSI process integration 5 / editors, C.L. Claeys ... [et al.]

資料種別:

図書

出版情報:

Pennington, N.J. : Electrochemical Society, c2007

形態:

ix, 495 p. ; 23 cm

シリーズ名:

ECS transactions ; vol. 11, no. 6 <BA78566502>

著者名:

ISBN:

9781566775724 [1566775728]

書誌ID:

BA83423796

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注記:	Includes bibliographical references and index Papers presented at the 5th Symposium on ULSI Process Integration at the 212th Meeting of the Electrochemical Society, Washington D.C., October 7-12, 2007
言語:	英語

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