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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfield Zwicker ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c2007
形態:
xi, 371 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 991 <BA00013775>
著者名:
ISBN:
9781558999510 [1558999515]
書誌ID:
BA83960649
子書誌情報
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