Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. / editors, Gerfield Zwicker ... [et al.]

資料種別:

図書

出版情報:

Warrendale, Pa. : Materials Research Society, c2007

形態:

xi, 371 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 991 <BA00013775>

著者名:

ISBN:

9781558999510 [1558999515]

書誌ID:

BA83960649

子書誌情報

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書誌詳細

注記:	"...Symposium C, "Advances and Challenges in Chemical Mechanical Planarization," held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California."--Pref Inclueds bibliographical references and indexes
主題:	Chemical mechanical planarization--Congresses; Microelectronics--Materials--Congresses
言語:	英語

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