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Proceedings of the third Symposium on Plasma Processing / edited by: J. Dieleman, R.G. Frieser, G. S. Mathad

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1982
形態:
xi, 516 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 82-6 <BA01323290>
著者名:
Symposium on Plasma Processing <DA03267153>
Dieleman, J. <DA09030678>
Frieser, R. G.
Mathad, G. S. <DA03249537>
Electrochemical Society. Dielectrics and Insulation Division <DA03570741>
Electrochemical Society. Electronics Division <DA0357072X>
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書誌ID:
BA84886020
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