Proceedings of the third Symposium on Plasma Processing | 東京工業大学附属図書館蔵書検索

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Proceedings of the third Symposium on Plasma Processing / edited by: J. Dieleman, R.G. Frieser, G. S. Mathad

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1982

形態:

xi, 516 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 82-6 <BA01323290>

著者名:

Symposium on Plasma Processing <DA03267153>

Dieleman, J. <DA09030678>

Mathad, G. S. <DA03249537>

Electrochemical Society. Dielectrics and Insulation Division <DA03570741>

Electrochemical Society. Electronics Division <DA0357072X>

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書誌ID:

BA84886020

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書誌詳細

その他の標題:	Plasma processing
注記:	Includes bibliographical references and index "... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref Sponsored by: the Dielectrics & Insulation Division and the Electronics Division
主題:	Integrated circuits--Large scale integration--Congresses
言語:	英語

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