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Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c1983
形態:
ix, 519 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 83-8 <BA01323290>
著者名:
書誌ID:
BA84901871
子書誌情報
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