Proceedings of the fourth Symposium on Plasma Processing | 東京工業大学附属図書館蔵書検索

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Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

資料種別:

図書

出版情報:

Pennington, N.J. : Electrochemical Society, c1983

形態:

x, 649 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 83-10 <BA01323290>

著者名:

Symposium on Plasma Processing <DA03267153>

Electrochemical Society. Meeting <DA03398898>

Mathad, G. S. <DA03249537>

Schwartz, G. C. <DA0325030X>

Electrochemical Society. Dielectrics and Insulation Division <DA03570741>

Electrochemical Society. Electronics Division <DA0357072X>

さらに 2 件

書誌ID:

BA84902513

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書誌詳細

その他の標題:	Plasma processing
注記:	Includes bibliographical references and indexes "... was held during the Spring meeting of the Electrochemical Society, May 8-13, 1983 in San Francisco, Calif." -- on pref
主題:	Plasma engineering--Congresses
言語:	英語

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