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Proceedings of the fourth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky ; [sponsored by] Dielectrics and Insulation and Electronics Divisions

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c1983
形態:
x, 649 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 83-10 <BA01323290>
著者名:
Symposium on Plasma Processing <DA03267153>
Electrochemical Society. Meeting <DA03398898>
Mathad, G. S. <DA03249537>
Schwartz, G. C. <DA0325030X>
Smolinsky, G.
Electrochemical Society. Dielectrics and Insulation Division <DA03570741>
Electrochemical Society. Electronics Division <DA0357072X>
さらに 2 件
書誌ID:
BA84902513
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