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Proceedings of the Fifth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, G. Smolinsky

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1985

形態:

x, 619 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 85-1 <BA01323290>

著者名:

Symposium on Plasma Processing <DA03267153>

Mathad, G. S. <DA03249537>

Schwartz, G. C. <DA0325030X>

Electrochemical Society. Dielectrics and Insulation Division <DA03570741>

Electrochemical Society. Electronics Division <DA0357072X>

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書誌ID:

BA84917678

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書誌詳細

その他の標題:	Plasma processing Proceedings of the 5th Symposium on Plasma Processing
注記:	Includes bibliographical references and indexes "... held during the fall meeting of the Electrochemical Society, Inc., October 7-14, 1984 in New Orleans, La." -- on pref Sponsored by: Dielectrics & Insulation and Electronics Divisions
主題:	Plasma etching--Congresses; Semiconductors--Etching--Congresses
言語:	英語

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