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Proceedings of the Sixth Symposium on Plasma Processing / edited by G.S. Mathad, G.C. Schwartz, R.A. Gottscho

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1987
形態:
x, 754 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 87-6 <BA01323290>
著者名:
Symposium on Plasma Processing <DA03267153>
Mathad, G. S. <DA03249537>
Schwartz, G. C. <DA0325030X>
Gottscho, R. A. <DA01106131>
Electrochemical Society. Dielectrics and Insulation Division <DA03570741>
Electrochemical Society. Electronics Division <DA0357072X>
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書誌ID:
BA84940691
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