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Proceedings of the Symposium on Laser Processes for Microelectronic Applications / edited by J.J. Ritsko, D.J. Ehrlich, M. Kashiwagi

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1988

形態:

vii, 251 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 88-10 <BA01323290>

著者名:

Symposium on Laser Processes for Microelectronic Applications

Ehrlich, Daniel J. <DA01101670>

柏木, 正弘 <DA1130942X>

Electrochemical Society. Dielectrics and Insulation Division <DA03570741>

Electrochemical Society. Electronics Division <DA0357072X>

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書誌ID:

BA84957071

子書誌情報

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書誌詳細

その他の標題:	Laser processes for microelectronic applications
注記:	Includes bibliographical references and index "... held in Honolulu, Hawaii, October 21-22, 1987" -- on pref "Dielectrics and Insulation and Electronics Divisions"
著者名ヨミ:	カシワギ, マサヒロ
主題:	Lasers--Industrial applications--Congresses; Microelectronics--Congresses
言語:	英語

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