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Proceedings of the First International Symposium on Advanced Materials for ULSI / edited by Martin Scott, Yoichi Akasaka, Rafael Reif
- 資料種別:
- 図書
- 出版情報:
- Pennington, NJ : Electrochemical Society, c1988
- 形態:
- vi, 246 p. ; 23 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 88-19 <BA01323290>
- 著者名:
- 書誌ID:
- BA84961873
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