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Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies / edited by Harzara S. Rathore, Geraldine C. Schwartz, Robin A. Susko ; [sponsored by] Dielectrics and Insulation and Electronics divisions

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c1989
形態:
viii, 495 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 89-6 <BA01323290>
著者名:
書誌ID:
BA84982807
子書誌情報
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