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Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing / edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller

資料種別:

図書

出版情報:

Pennington, NJ : Electrochemical Society, c1988

形態:

viii, 484 p. ; 23 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 88-13 <BA01323290>

著者名:

書誌ID:

BA84987414

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書誌詳細

その他の標題:	Automated integrated circuits manufacturing
注記:	Includes bibliographical references and indexes Co-sponsored by: the Electronics and Dielectrics and Insulation Divisions "... held October 18-23, 1987 in Honolulu, Hawaii" -- on pref
主題:	Integrated circuits--Design and construction--Data processing--Congresses
言語:	英語

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