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Two- and three-dimensional methods for inspection and metrology III : 24-26 October, 2005, Boston, Massachusetts, USA / Kevin G. Harding, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2005
形態:
1 v. (various pagings) ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6000 <BA0022700X>
著者名:
ISBN:
9780819460240 [0819460249] (pbk.)
書誌ID:
BA85939927
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