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Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA / Peisen S. Huang, chair/editor ; sponsored and published by by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2006
形態:
1 v. (various pagings) ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6382 <BA0022700X>
著者名:
ISBN:
9780819464804 [0819464805]
書誌ID:
BA85940008
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