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Advanced microlithography technologies : 8-10 November, 2004, Beijing, China / Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2005
形態:
xi, 380 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5645 <BA0022700X>
著者名:
Advanced Mcrolithography Technologies
Wang, Yangyuan
Yao, Jun'en
Progler, Christopher J.
Society of Photo-optical Instrumentation Engineers <DA00848546>
Chinese Optical Society <DA04252785>
Australian Optical Society
National Natural Science Foundation of China <DA04495550>
さらに 3 件
ISBN:
9780819456007 [0819456004]
書誌ID:
BA85977573
子書誌情報
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