Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA | 東京工業大学附属図書館蔵書検索

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Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA / Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c2004

形態:

xxx, 248 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5378 <BA0022700X>

著者名:

ISBN:

9780819452917 [0819452912]

書誌ID:

BA86005271

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Intelligent control systems--Mathematical models--Congresses; Manufacturing processes--Automatic control--Congresses; Manufacturing processes--Mathematical models--Congresses; Process control--Mathematical models--Congresses
言語:	英語

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