Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA / Iraj Emami, chair/editor ; Christopher P. Ausschnitt, Kenneth W. Tobin, Jr., cochair/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH ; published by SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c2005
- 形態:
- xxxiii, 260 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5755 <BA0022700X>
- 著者名:
- ISBN:
- 9780819457356 [0819457353]
- 書誌ID:
- BA86005442
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