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Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA / Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2004
形態:
xxviii, 302 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5379 <BA0022700X>
著者名:
ISBN:
9780819452924 [0819452920]
書誌ID:
BA86008098
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