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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA / Alfred K.K. Wong, Vivek, K. Singh, chairs/editors ; cooperating organization, SEMATECH, Inc (USA) ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2006
形態:
1 v. (various pagings) ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6156 <BA0022700X>
著者名:
ISBN:
9780819461995 [0819461997]
書誌ID:
BA86008316
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