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Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1999
形態:
x, 512 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3893 <BA0022700X>
著者名:
Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)
Courtois, B. (Bernard) <DA09741734>
Demidenko, S. N. (Sergeĭ Nikolaevich) <DA02958975>
Society of Photo-optical Instrumentation Engineers <DA00848546>
IREE Society
Queensland. Government State Development
さらに 1 件
ISBN:
9780819434944 [0819434949]
書誌ID:
BA86009862
子書誌情報
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