Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia | 東京工業大学附属図書館蔵書検索

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Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1999

形態:

x, 512 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3893 <BA0022700X>

著者名:

Design, Characterization, and Packaging for MEMS and Microelectronics (Conference)

Courtois, B. (Bernard) <DA09741734>

Demidenko, S. N. (Sergeĭ Nikolaevich) <DA02958975>

Society of Photo-optical Instrumentation Engineers <DA00848546>

Queensland. Government State Development

さらに 1 件

ISBN:

9780819434944 [0819434949]

書誌ID:

BA86009862

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Design and construction--Congresses; Microelectronic packaging--Congresses
言語:	英語

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