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Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia / Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization IEEE South Australia Section

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
ix, 322 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4593 <BA0022700X>
著者名:
ISBN:
9780819443236 [0819443239]
書誌ID:
BA86009975
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