Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France | 東京工業大学附属図書館蔵書検索

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Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France / Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2002

形態:

xvii, 832 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4755 <BA0022700X>

著者名:

ISBN:

9780819445186 [0819445185]

書誌ID:

BA86010806

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Microelectronic packaging--Congresses; Micromachining--Congresses; Optoelectronic devices--Congresses
言語:	英語

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