Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia | 東京工業大学附属図書館蔵書検索

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Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1999

形態:

vii, 394 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3892 <BA0022700X>

著者名:

Device and Process Technologies for MEMS and Microelectronics (Conference)

Dimitrijev, Sima, 1958-

Society of Photo-optical Instrumentation Engineers <DA00848546>

Institution of Radio and Electronics Engineers, Australia <DA03821819>

Queensland. Government State Development

Griffith University Microelectronics Engineering Society

さらに 2 件

ISBN:

9780819434937 [0819434930]

書誌ID:

BA86012776

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Photolithography--Congresses; Photomechanical processes--Congresses; Photon detectors--Design and construction--Congresses
言語:	英語

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