Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia | 東京工業大学附属図書館蔵書検索

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Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia / Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2004

形態:

xxxiv, 566 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5276 <BA0022700X>

著者名:

ISBN:

9780819451699 [081945169X]

書誌ID:

BA86012925

子書誌情報

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書誌詳細

その他の標題:	Device and process technologies for MEMS and microelectronics
注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Photolithography--Congresses; Photomechanical processes--Congresses; Photonics--Congresses
言語:	英語

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