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Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA / Emile J. Knystautas, Wiley P. Kirk, Valerie Browning, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2001
形態:
ix, 192 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4468 <BA0022700X>
著者名:
ISBN:
9780819441829 [0819441821]
書誌ID:
BA86049481
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