Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA | 東京工業大学附属図書館蔵書検索

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Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA / Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2001.s

形態:

xxx, 152 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4284 <BA0022700X>

著者名:

ISBN:

9780819439628 [0819439622]

書誌ID:

BA86064918

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Congresses; Microelectronic packaging--Congresses; Optoelectronic devices--Congresses
言語:	英語

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