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Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA / Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2002
形態:
v, 104 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4647 <BA0022700X>
著者名:
ISBN:
9780819443861 [0819443867]
書誌ID:
BA8606493X
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