| List of Contributors |
| Introduction: LIGA and Its Applications / Volker Saile1： |
| X-ray Masks for LIGA Microfabrication / Yohannes Desta ; Jost Goettert2： |
| Innovative Exposure Techniques for 3D Microfabrication / Naoki Matsuzuka ; Osamu Tabata3： |
| Hot Embossing of LIGA Microstructures / Mathias Heckele ; Matthias Worgull4： |
| Exposure and Development Simulation for Deep X-ray LIGA / Jan G. Korvink ; Sadik Hafizovic ; Yoshikazu Hirai ; Pascal Meyer5： |
| Design for LIGA and Safe Manufacturing / Ulrich Gengenbach ; Ingo Sieber ; Ulrike Wallrabe6： |
| Commercialization of LIGA / Ron A. Lawes7： |
| Polymer Optics and Optical MEMS / Jurgen Mohr8： |
| Refractive X-ray Lenses Produced by X-ray Lithography / Arndt Last9： |
| RF Applications / Sven Achenbach ; David M. Klymyshyn10： |
| Evolution of the Microspectrometer / Reiner Wechsung ; Sven Schonfelder ; Andreas Decker11： |
| Actuator Manufacture with LIGA Processes / Todd Christenson12： |
| Development of Microfluidic Devices Created via the LIGA Process / Masaya Kurokawa13： |
| Application of Inspection Devices / Yoshihiro Hirata14： |
| The Micro Harmonic Drive Gear / Reinhard Degen ; Rolf Slatter15： |
| Microinjection Molding Machines / Christian Gornik16： |
| Filled Resist Systems / Thomas Hanemann ; Claas Muller ; Michael Schulz17： |
| Dramatic Downsizing of Soft X-ray Synchrotron Light Source from Compact to Tabletop / Hironari Yamada ; Norio Toyosugi ; Dorian Minkov ; Yoshiko Okazaki18： |
| PTFE Photo-fabrication by Synchrotron Radiation / Takanori Katoh ; Yanping Zhang19： |
| Index |
| List of Contributors |
| Introduction: LIGA and Its Applications / Volker Saile1： |
| X-ray Masks for LIGA Microfabrication / Yohannes Desta ; Jost Goettert2： |
| Innovative Exposure Techniques for 3D Microfabrication / Naoki Matsuzuka ; Osamu Tabata3： |
| Hot Embossing of LIGA Microstructures / Mathias Heckele ; Matthias Worgull4： |
| Exposure and Development Simulation for Deep X-ray LIGA / Jan G. Korvink ; Sadik Hafizovic ; Yoshikazu Hirai ; Pascal Meyer5： |
