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Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A. / editors: Martin Gall ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c2009
形態:
xiii, 189 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 1156 <BA00013775>
著者名:
Materials Research Society. Spring Meeting <DA02961732>  
ISBN:
9781605111292 [1605111295]
書誌ID:
BB02098776
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