Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. | 東京工業大学附属図書館蔵書検索

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Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. / editors: Ashok Kumar ... [et al.]

資料種別:

図書

出版情報:

Warrendale, Pa. : Materials Research Society, c2010

形態:

ix, 165 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 1157 <BA00013775>

著者名:

ISBN:

9781605111308 [1605111309]

書誌ID:

BB0223199X

子書誌情報

フルテキスト

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書誌詳細

注記:	Other editors: C. Fred Higgs III, Chad S. Korach, Subramanian Balakumar Includes bibliographical references and indexes "..., 'Science and technology of chemical mechanical planarization (CMP),' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.
言語:	英語

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