Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. | 東京工業大学附属図書館蔵書検索

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Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. / editors, Jörg Bagdahn ... [et al.]

資料種別:

図書

出版情報:

Warrendale, Pa. : Materials Research Society, c2010

形態:

ix, 211 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 1222 <BA00013775>

著者名:

ISBN:

9781605111957 [1605111953]

書誌ID:

BB06280330

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注記:	"... papers presented at Symposium DD, 'Microelectromechanical Systems--Materials and Devices III,' held November 30-December 2 at the 2009 MRS Fall Meeting in Boston, Massachusetts"--Pref Includes bibliographical references and indexes
主題:	Microelectromechanical systems--Congresses; Microelectromechanical systems--Materials--Congresses; Nanostructured materials--Congresses; Silicon--Congresses; Thin films--Congresses
言語:	英語

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