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Silicon carbide microsystems for harsh environments / Muthu B.J. Wijesundara, Robert G. Azevedo

資料種別:

図書

出版情報:

New York : Springer, c2011

形態:

xv, 232 p. ; 25 cm

シリーズ名:

MEMS reference shelf <BA84199960>

著者名:

ISBN:

9781441971203 [1441971203] (: hbk.)

書誌ID:

BB06318353

子書誌情報

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書誌詳細

注記:	Series no. on publisher's site: v. 22
主題:	Microelectronics--Materials; Silicon carbide
言語:	英語

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