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Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A. / editors, Mikhail R. Baklanov ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society
Cambridge ; New York : Cambridge University Press, 2012
形態:
ix, 127 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 1335 <BA00013775>
著者名:
ISBN:
9781605113128 [1605113123] (: hard)
書誌ID:
BB08538361
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