Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China | 東京工業大学附属図書館蔵書検索

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Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China / Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c2001

形態:

xi, 440 p. ; 30 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4601 <BA0022700X>

著者名:

ISBN:

9780819443403 [0819443409]

書誌ID:

BB29822614

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Electromechanical devices--Design and construction--Congresses; Microfabrication--Congresses; Micromachining--Congresses
言語:	英語

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