EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France | 東京工業大学附属図書館蔵書検索

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EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., : SPIE, c2007

形態:

1 v. (various pagings) ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6533 <BA0022700X>

著者名:

ISBN:

9780819466556 [0819466557]

書誌ID:

BC02384761

子書誌情報

フルテキスト

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書誌詳細

その他の標題:	Twenty third European mask and lithography conference
注記:	Includes bibliographical references and author index
主題:	Integrated circuits--Masks--Congresses; Microlithography--Congresses
言語:	英語

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