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Smart sensors, actuators, and MEMS III : 2-4 May 2007, Maspalomas, Gran Canaria, Spain / Thomas Becker, Carles Cané, N. Scott Barker, editors ; sponsored by SPIE Europe ; cooperating organizations, PhOREMOST ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2007

形態:

1 v. (various pagings) ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6589 <BA0022700X>

著者名:

Smart Sensors, Actuators, and MEMS

Barker, N. Scott

Society of Photo-optical Instrumentation Engineers <DA00848546>

SPIE Europe <DA1538798X>

さらに 2 件

ISBN:

9780819467171 [0819467170]

書誌ID:

BC02746862

子書誌情報

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書誌詳細

その他の標題:	Smart sensors, actuators, and MEMS 3 Smart sensors, actuators, and MEMS three
注記:	Includes bibliographical references and author index
主題:	Actuators--Industrial applications--Congresses; Detectors--Industrial applications--Congresses; Microelectromechanical systems--Congresses; Microtechnology--Congresses; Scanning systems--Congresses
言語:	英語

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