Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas | 東京工業大学附属図書館蔵書検索

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Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas / John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1995

形態:

ix, 302 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2638 <BA0022700X>

著者名:

ISBN:

9780819420046 [0819420042]

書誌ID:

BC06604688

子書誌情報

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書誌詳細

その他の標題:	Optical characterization techniques for high-performance microelectronic device manufacturing 2
注記:	Includes bibliographical references and index
主題:	Integrated circuits industry--Congresses; Integrated circuits--Design and construction--Congresses; Manufacturing processes--Congresses; Optical detectors--Congresses; Semiconductors--Design and construction--Congresses; Semiconductors--Testing--Optical methods--Congresses
言語:	英語

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