Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas | 東京科学大学図書館　蔵書検索（大岡山図書館、すずかけ台図書館）

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Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas / Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c1995

形態:

ix, 246 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2640 <BA0022700X>

著者名:

ISBN:

9780819420060 [0819420069]

書誌ID:

BC06604779

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographic references and author index
主題:	Measurement--Congresses; Microlithography--Congresses; Micromachining--Congresses
言語:	英語

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