Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas | 東京工業大学附属図書館蔵書検索

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Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1996

形態:

ix, 218 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2877 <BA0022700X>

著者名:

ISBN:

9780819422750 [0819422754]

書誌ID:

BC06860076

子書誌情報

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書誌詳細

その他の標題:	Optical characterization techniques for high-performance microelectronic device manufacturing 3
注記:	Includes bibliographical references and index
主題:	Integrated circuits industry--Congresses; Integrated circuits--Design and construction--Congresses; Manufacturing processes--Congresses; Optical detectors--Congresses; Semiconductors--Design and construction--Congresses; Semiconductors--Testing--Optical methods--Congresses
言語:	英語

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