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Micromachining and imaging : 13 February 1997, San Jose, California / Terry A. Michalske, Mark A. Wendman, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organization, DARPA--Defense Advanced Research Projects Agency

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c1997
形態:
v, 152 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3009 <BA0022700X>
著者名:
ISBN:
9780819424204 [081942420X]
書誌ID:
BC06930309
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