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Materials and device characterization in micromachining II : 20-21 September 1999, Santa Clara, California / Yuli Vladimirsky, Craig R. Friedrich, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c1999
形態:
ix, 256 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3875 <BA0022700X>
著者名:
ISBN:
9780819434722 [0819434728]
書誌ID:
BC07420782
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