Nondestructive evaluation and reliability of micro- and nanomaterial systems : 18-19 March 2002, Newport Beach, USA | 東京工業大学附属図書館蔵書検索

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Nondestructive evaluation and reliability of micro- and nanomaterial systems : 18-19 March 2002, Newport Beach, USA / Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash., USA : SPIE, c2002

形態:

ix, 228 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4703 <BA0022700X>

著者名:

ISBN:

9780819444516 [0819444510]

書誌ID:

BC07733802

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Microelectromechanical systems--Evaluation; Microelectromechanical systems--Reliability; Nanostructured materials--Testing--Congresses; Nondestructive testing--Congresses; Quality control--Congresses; Surfaces (Technology)--Congresses
言語:	英語

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