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Nanostructure integration techniques for manufacturable devices, circuits, and systems : interfaces, interconnects, and nanosystems : 23-25 October, 2005, Boston, Massachusetts, USA / Minoru M. Freund, M. Saif Islam, Achyut K. Dutta, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2005
形態:
1 v. (various pagings) ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6003 <BA0022700X>
著者名:
ISBN:
9780819460271 [0819460273] (pbk.)
書誌ID:
BC08359392
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