Nanostructure integration techniques for manufacturable devices, circuits, and systems : interfaces, interconnects, and nanosystems : 23-25 October, 2005, Boston, Massachusetts, USA / Minoru M. Freund, M. Saif Islam, Achyut K. Dutta, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c2005
- 形態:
- 1 v. (various pagings) ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 6003 <BA0022700X>
- 著者名:
- ISBN:
- 9780819460271 [0819460273] (pbk.)
- 書誌ID:
- BC08359392
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