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Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis and applications / Andrew T. S. Wee, Xinmao Yin, Chi Sin Tang

資料種別:
図書
出版情報:
Weinheim : Wiley-VCH, c2022
形態:
x, 187 p. ; 25 cm
著者名:
ISBN:
9783527349517 [3527349510] (: pbk)
書誌ID:
BC15336706
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