MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA | 東京工業大学附属図書館蔵書検索

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MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA / Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2004

形態:

xxxi, 232 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5344 <BA0022700X>

著者名:

ISBN:

9780819452528 [0819452521]

書誌ID:

BC16159005

子書誌情報

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書誌詳細

その他の標題:	MEMS MOEMS components and their applications
注記:	Includes bibliographical references and author index
主題:	Microelectromechanical systems--Congresses; Optoelectronic devices--Congresses
言語:	英語

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