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Deposition and Growth: Limits for Microelectronics / Gary W. Rubloff, American Institute of Physics.

資料種別:
電子ブック
出版情報:
AIP Conference Proceedings (American Institute of Physics)
AIP Publishing, 1988
著者名:
ISBN:
9780883183670 [0883183676]
書誌ID:
OB00239554
子書誌情報
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