1.
図書 |
Michael J. Lercel, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH
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2.
図書 |
Michael J. Lercel, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH
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3.
図書 |
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
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4.
図書 |
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
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5.
図書 |
Donis G. Flagello, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH Inc.
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6.
図書 |
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
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7.
図書 |
Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; cosponsored by Japan Chapter of SPIE ... [et al.]
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8.
図書 |
Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
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9.
図書 |
Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
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10.
図書 |
Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering
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11.
図書 |
Naoaki Aizaki, editor ; sponsored by Photomask Japan, BACUS, SPIE--The International Society for Optical Engineering ; supporting societies, The Japan Society of Applied Physics ... [et al.] ; published by SPIE--The International Society for Optical Engineering
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12.
図書 |
Hiroaki [i.e. Hiraoki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan
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13.
図書 |
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; supported by Yokohama City
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14.
図書 |
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, the Japan Society of Applied Physics ... [et al.] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
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15.
図書 |
15. Photomask and next-generation lithography mask technology X : 16-18 April, 2003, Yokohama, Japan
Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
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16.
図書 |
Richard B. Hoover, Arthur B.C. Walker, Jr., chair/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
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17.
図書 |
Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
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18.
図書 |
Richard B. Hoover, Arthur B.C. Walker, Jr. chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering
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19.
図書 |
David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
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20.
図書 |
Richard B. Hoover, Arthur B.C. Walker, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
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21.
図書 |
David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
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22.
図書 |
Natale M. Ceglio, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
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23.
図書 |
Martin Peckerar, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
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24.
図書 |
Arnold W. Yanof, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
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25.
図書 |
Martin Peckerar, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
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26.
図書 |
Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
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27.
図書 |
Arnold W. Yanof, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering
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28.
図書 |
Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering
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29.
図書 |
Phillip D. Blais, chairman/editor
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30.
図書 |
Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering
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31.
図書 |
Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
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32.
図書 |
Elizabeth A. Dobisz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
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33.
図書 |
Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.]
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34.
図書 |
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
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35.
図書 |
35. Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA
Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
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36.
図書 |
R. Scott Mackay, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
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37.
図書 |
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
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38.
図書 |
Hiraoki Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Japan Society of Applied Physics ... [et al.]
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